Nanostructure fabrication by electron-beam-induced deposition with metal carbonyl precursor and water vapor (Special issue: Microprocesses & nanotechnology)
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概要
- 論文の詳細を見る
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
著者
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Furuya Kazuo
High Voltage Electron Microscopy Station National Institute For Materials Science
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Takeguchi M
National Institute For Materials Science
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