Modeling the Process of Electron-Beam-Induced Deposition by Dynamic Monte Carlo Simulation
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概要
- 論文の詳細を見る
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2005-07-30
著者
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Furuya Kazuo
High Voltage Electron Microscopy Station National Institute For Materials Science
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MITSUISHI Kazutaka
High Voltage Electron Microscopy Station, National Institute for Materials Science
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LIU Zhi-Quan
High Voltage Electron Microscopy Station, National Institute for Materials Science
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