Fabrication of Alpha-Iron and Iron Carbide Nanostructures by Electron-Beam Induced Chemical Vapor Deposition and Postdeposition Heat Treatment

概要

論文の詳細を見る
We succeeded in fabricating crystalline alpha-iron nanostructures with desired shapes. Electron-beam-induced chemical vapor deposition with iron carbonyl gas, Fe(CO)5, was carried out at room temperature in a field-emission-gun scanning electron microscope to fabricate nanodots, nanorods and square frames. The as-deposited structures exhibited an amorphous phase containing iron, carbon and oxygen in their entire volumes and iron oxide nanocrystals existed near their surfaces. Postdeposition heat treatment at about 600°C resulted in the formation of crystalline alpha-iron and iron carbide phases in their structures, while maintaining their shapes. Quantitative elemental analyses using electron energy loss spectroscopy suggested that the original as-deposited iron-to-carbon compositional ratio is crucial in determining the stoichiometry of the produced structures after the heat treatment.
Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
2005-07-15