Surface Texturing for Wafer-Bonded Vertical-Type GaN/Mirror/Si Light-Emitting Diodes

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概要

• 論文の詳細を見る

• An n-side-up GaN/mirror(Pd/Au)/Si light-emitting diode (LED) with surface texturing has been fabricated by a combination of wafer-bonding, laser lift-off, and surface texturing techniques. Two concentrations of KOH solution were used to roughen the n-GaN surface. In order to obtain a uniformly roughened surface, the solution was heated instead of being subjected to photoirradiation. The GaN/Pd/Au/Si LEDs with surface texturing exhibited a maximum luminance intensity of 130 mcd (at 20 mA) with a forward voltage of 3.2 V. The luminance intensity is over two times larger than that of the original planar GaN/sapphire LEDs (at 20 mA). Under high current injection, the surface textured GaN/Pd/Au/Si LEDs also showed a more stable luminance intensity. This feature is attributed to the Si substrate providing a good heat sink and surface roughening enhancing the external quantum efficiency. Furthermore, the n-side-up GaN/mirror(Pd/Au)/Si LEDs with surface texturing have been demonstrated to have high reliability.

• Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
• 2005-05-15

著者

• HUANG Shao-Hua

  Department of Materials Engineering, National Chung Hsing University

• CHEN Tsung-Yu

  R&D Department, Advanced Epitaxy Technology Inc.

• Hsu Shun-cheng

  Department Of Materials Engineering National Chung Hsing University

• Horng Ray-hua

  Institute Of Precision Egineering National Chung Hsing University

• Wuu Dong-Sing

  Department of Electrical Engineering, Da-Yeh University

• Chen Tsung-Yu

  R&D Department, Advanced Epitaxy Technology Inc., Hsinchu Industrial Park, Taiwan 303, R.O.C

• Wuu Dong-Sing

  Department of Materials Engineering, National Chung Hsing University, Taichung, Taiwan 402, R.O.C

• Horng Ray-Hua

  Institute of Precision Engineering, National Chung Hsing University, Taichung, Taiwan 402, R.O.C

• Huang Shao-Hua

  Department of Materials Engineering, National Chung Hsing University, Taichung, Taiwan 402, R.O.C

• Horng Ray-Hua

  Institute of Electrical Engineering, Da-Yeh University, Chang-Hwa 515, Taiwan, ROC

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