535 ナノ構造薄膜/均質体界面端近傍における応力分布解析(OS7-1 微視構造を有する材料の変形と破壊,OS7 微視構造を有する材料の変形と破壊)

概要

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The purpose of this study is to examine the stress distribution near the interface edge between a nanostructured thin film and a solid body. A nanostructured thin film consists of Ta_2O_5 helical nanosprings is fabricated by dynamic oblique deposition. The mechanical properties of the thin film are obtained by vertical and lateral loading tests using a diamond tip built into an atomic force microscope. A finite element analysis for a component, which has the free edge of the interface between the thin film and an elastic solid body, is conducted under uniform displacement. The analysis indicates the absence of not only stress singularity but also high stress concentration near the free edge. The characteristic stress distribution near the interface is due to the nanoscopically discrete structure of the thin film.
2007-10-24