1506 非対称ナノ構造を有する薄膜の界面強度異方性(OS15-2 ナノ・マイクロの視点からの変形と破壊の力学)

概要

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We develop a delamination method to clarify the mechanics of interface fracture of thin films composed of oblique nano-columns fabricated by glancing angle deposition (GLAD). A micro- specimen is fabricated where Ti oblique nano-columns are sandwiched between a Ti solid layer and a Si substrate. A load is applied to the solid layer with a diamond indenter, and thereby delamination stress is effectively applied to the interface between the nano-columns and substrate. The nano-columns are separated from the substrate, and critical load at the delamination is successfully evaluated. The results indicate the strong anisotropy in interface strength where the strength to loading in forward (with the column tilt) direction is higher than that in reverse (against the column tilt) direction.
一般社団法人日本機械学会の論文
2010-10-09