610 SiN薄膜マイクロエレメントの強度特性と寸法効果(OS10(2) 拡大する実験力学・新領域への拡大)

概要

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The mechanical properties of SiN thin film microelements were evaluated using the previously developed testing system for the mechanical properties of thin tensile microelements. The testing system consists of a tensile testing machine actuated by a PZT driven positioning stage, a micro manipulation system, a noncontact strain measurement system with a help of a double-filed-of-view microscope. In order to investigate the size effects on the mechanical properties, the thickness of the sample used were 1μm and 3μm, and the width was varied from 5μm to 50μm. The Young's modulus of the SiN thin film was 226±11GPa, irrespective of sample size. However, the tensile strength increased with a decrease in thickness and sample width, or sample cross sections.
社団法人日本機械学会の論文
2006-08-03