216 曲げ試験による薄膜微小素子のヤング率測定と有限要素解析(GS5 応力解析33)

概要

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Mechanical properties of thin polysilicon microelements were evaluated by using the nano mechanical test system. The in-situ image observed by the indenter probe helps to position it within sub-micrometers of the desired test location. The Young's modulus obtained by bending tests with a help of FEM analysis was 145GPa To analyze the effect of the crystal orientations on the Youngs modulus, three-dimensional finite element model was developed using a Voronoi structure. The crystal orientation of the film was analyzed by means of an electron back-scattering diffraction pattern (EBSP) method The front surface of the film had no oriented structure. Therefore, random crystal orientation was given to each grain of the FEM model. Young's modulus obtained by this FEM analysis was 161GPa.
一般社団法人日本機械学会の論文
2005-11-03