915 引張および曲げ応力下のポリシリコン薄膜微小素子の機械的特性と疲労挙動評価(GS-4,16 薄膜(1),研究発表講演)

概要

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The mechanical properties of 3.8μm thick polysilicon microelements were evaluated by using a bending testing system based upon a Nano Indenter with a knife-edge type indenter and a piezo stage. Tension-tension fatigue strength were also investigated by using the mechanical testing system for thin tensile microelements. The fracture strength and Young's modulus obtained by bending tests with a help of FEM analysis were respectively 4.0±0.6 GPa and 155±7 GPa. The influence of environment on the tension-tension fatigue tests were carried out in laboratory air, dry air and water at a frequency between 0.1 and 10Hz. The specimens fatigued in water show fatigue fracture, whereas those in laboratory air and dry air did run out up to 10^7 cycles.
2005-03-18