OS1603 自立Cuナノ薄膜の疲労き裂進展における膜厚効果(OS16-1 ナノ・マイクロ材料,薄膜の変形と強度,OS-16 ナノ・マイクロの視点からの変形と破壊の力学)

概要

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We developed a method for evaluating the fatigue crack propagation behavior of freestanding Cu nano-films to clarify the thickness effect in the nanoscale. We fabricated freestanding specimens with the nanometer or submicron-meter thickness and the width and length on the millimeter order to address the crack propagation over a long distance. Fatigue crack propagation tests were carried out for about 500 nm-thick single-edge-notch tension specimen, whose notch was introduced by focused ion beam, under constant gross stress of 150 MPa. Results revealed that the fatigue crack began to propagate from the notch tip and stably propagated. The crack then gradually accelerated and finally unstably fractured. The fatigue crack propagation rate da/dN of the nano-films was much higher than that of bulk counterpart in entire ΔK region. The fracture morphology depended on the crack propagation rate, i.e. the larger plastic deformation occurred near the crack tip in the faster region.
一般社団法人日本機械学会の論文
2011-07-16