437 サーモグラフィによる薄膜アモルファス合金ライブラリの結晶化開始温度測定法(複合機能化材料・デバイスとその加工プロセス)

概要

論文の詳細を見る
In this paper, we develop a novel high-throughput characterization method of crystallization temperature on a thin film library with thin film composition spread. Crystallization temperature of thin film amorphous alloy can be detected as a change of emissivity using a thermography. For this method, a particular thin film library which has temperature reference area and tantalum covered grid is proposed and fabricated by MEMS process. Here, Pd-Cu-Si thin film library is deposited using combinatorial arc plasma deposition and 107 amorphous samples are confirmed on the library by X-ray diffraction as deposition with wide distribution of Pd at.%. The thin film library is heated by IR heater with thermography monitoring and crystallization temperature of 95 amorphous samples on the library can be detected at once.
2009-11-06