ジャーナル型アクティブエアベアリング(第2報) : 形状特性および絶対回転運動精度の検討

概要

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Aiming the achievement of an absolutely high rotary motion accuracy, the paper introduces an improved model of the Active Air Journal Bearing (AAJB) which is a bearing capable of controlling two radial motion of its axis. The model considers its two profile characteristics, i.e. effects of the axis profile errors at the sliding and reference zones on the rotary motion accuracy. Based on the model, transfer functions of these characteristics are derived. With a prototype AAJB, profiles characteristics are simulated and a method of compensating motion errors due to the axis profile errors is proposed. In the method, the profile error of the axis reference zone is measured first, and then the error is sent to the two degrees of freedom controller as the axis positioning reference signal. At a relatively high axis rotational speed, since the controller cannot compensate satisfactorily, an additional repetitive controller is used. Experimental results show that the proposed compensation method can achieve an absolute rotary motion accuracy of 21nm at a speed of 750rpm.
1992-06-05