薄膜金属ガラスの成膜と物性

概要

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Owing to their mechanical isotropy, structural homogeneity and good formability for three-dimensional micro structure, thin film metallic glasses (TFMGs) are considered to be one of ideal materials for micro-electro-mechanical systems (MEMS). However the physical properties of thin film metallic glasses have not yet examined sufficiently. In this paper, physical properties of two kinds of TFMGs; Zr-based (Zr_<75>Cu_<19>Al_<6,atomic %) and Pd-based (Pd_<76>Cu_7Si_<17>), were examined to provide an important guide for the analysis and design of their MEMS applications. The TFMGs were fabricated using RF-magnetron sputtering system. Firstly, an influence of sputtering condition on amorphicity and toughness were examined. Secondly, amorphicity, composition and supercooled liquid region of the as-sputtered TFMCS Were verified. Thirdly, the thermal, chemical, mechanical and electrical properties of the TFMGs were experimentally examined. Finally, an influence of annealing of the Pd based TFMG on its Young's modulus was clarified. As a result of this study, it became clear that the TFMGs are suitable for elastic MEMS.
公益社団法人精密工学会の論文
2001-10-05