6自由度微動機構の研究(第2報) : 制御特性

概要

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The purpose of the study is to establish the six-degrees of freedom(dof) fine motion mechanism which has the following characteristics : (1)each of the six one-dof motion has the same control characteristics as the others, (2)each one-dof motion does not interfere with the others. In the previous study, the mechanism was theoretically designed so that the open loop characteristics of the six one-dof motions were the same, and so that there was no interference between the motions. Following this, an experimental mechanism was made. In the present study, first, a controller is designed taking only one of the six one-dof motions into account, and then, the same controller parameters are applied to the other five one-dof motions resulting in the same control characteristics as those of the first designed. Thus, it is shown that a controller for each motion does not need to be designed individually.
社団法人精密工学会の論文
1992-06-05