金属ガラスの精密・微細加工に関する研究 : Zr基金属ガラスの過冷却液体域における成形性

概要

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Amorphous alloys with the wide supercooled liquid region are called metallic glasseS. In the supercooled liquid state, the metallic glasses exhibit superplasticity, which suggests the possibilities of forming the metallic glasses into various intricate shapes. In this paper, formability of two types of Zr based metallic glass; Zr_<75>Cu_<19>Al_6 and Zr_<55>Cu_<30>Al_<10>Ni_5 (atomic%) are examined in the supercooled liquid state. The example metallic glasses showed superplasticity under compressire stress and high thermal stability in the supercooled liquid state. Furthermore, forming accuracy of the example metallic glasses was better than one micrometer. As the application of such precise forming, a concave mirror with a l0 mm diameter was formed. The profile error of the mirror was 0.5 μm and the surface roughness (Rmax), 90 nm. This superplastic forming of the Zr based metallic glasses is expected to be used for the production of various components of high precision and intricate shape.
一般社団法人日本機械学会の論文
1999-05-25