薄膜金属ガラスを用いた微細構造物の製作(第1報) : 薄膜金属ガラスの製作と過冷却液体域を利用した微細成形

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This paper describes the fabrication process, internal stress relaxation and micro-forming of a thin film metallic glass (TFMG). Metallic glasses are kind of amorphous alloys having suitable characteristics for micro-mechanical systems as isotropic and homogeneous. Moreover metallic glasses softens in a certain temperature range called the supercooled liquid state, which makes metallic glasses easily formed into a three-dimensional shape. In this paper, Zr based TFMG was deposited by RF magnetron sputtering. The TFMG had the supercooled liquid state whose temperature width was 61K. Its physical properties such as density, corrosion resistance were measured as well. Micro-beams of TFMG were made by the rift off process. Although, the produced micro-beams buckled because of the internal stress by sputtering, this internal stress was relaxed by heating TFMG to the supercooled liquid state. Finally, TFMG micro beams were softened and micro-formed by heating it into the supercooled liquid state. The deformation mechanism was analyzed using a bimetal cantilever model and calculated results coincided with experimental ones.
2000-01-05