集積化MEMS血球分析チップ

概要

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In the present study, a novel integrated MEMS hematology chip that consists of complete blood count (CBC) sensor, hemoglobin (HGB) sensor and volume measurement sensor, was developed. CBC sensing is based on an impedance method that uses a micro aperture. On the other hand, the HGB concentration and sample volume were measured from optical absorption and optical refraction, respectively. Therefore, the integrated MEMS hematology chip was designed as a laminated structure; i.e. impedance layer (thickness 100 μm) including CBC sensor and optical layer (thickness 250 μm) including HGB sensor and volume measurement sensor. The integrated MEMS hematology chip was fabricated using a SU-8 photolithography process with build-in Cr mask layer. In addition, the proposed hematology chip was evaluated using an experimental device that simulates a POCT hematology analyzer. A trial measurement of control blood was successfully performed. The new MEMS hematology chip demonstrated potential application as a miniature hematology analyzer.
2008-07-05