インテリジェント制御法を用いた粗微動位置決め系の制御性能

概要

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As a high precision positioning system with a long working range and high speed, two-stage positioning systems which include the coarse and the fine positioning mechanisms have been proposed. However their most suitable control method has been clarified yet. The purpose of this research is to clarify the most suitable control method for the systems theoretically and experimentally. For this purpose, this paper discusses the performances of the positioning systems with two kinds of intelligent control methods such as the neural control and the fuzzy control ones. Each controller comprises two sub-controllers ; one is for the coarse positioning mechanism and the other is for the fine one. Both controllers are designed by using the dynamic reference models of the mechanism which is expressed on phase plane. Effect of step height, the table mass and constant load changes on the positioning performances are evaluated by simulation and experiment.
社団法人日本機械学会の論文
2000-08-25