磁気ねじをもちいた機構の起動時の特性と位置決め精度

概要

論文の詳細を見る
A magnetic lead screw mechanism (MLS) comprises a conventional steel lead screw and the magnetic nut which is made from a helically-magnetized cylindrical permanent magnet and an external steel cover. A driving force from the screw to the nut is transmitted through the magnetic coupling without mechanical contact. So the MLS can be used in a vacuum, does not make noise and vibration, and is free from lubrication problem. In this paper, first, a positioning mechanism using a MLS, a linear ball guide to support a table, and a DC motor is introduced. Then the start-up characteristics is clarified by simulation using a dynamic model which is identified by experimental data. Finally the table of the mechanism is positioned with using a laser measurement system as a feedback sensor. The results show that the MLS can drive a 4.5 kg table with maximum 3.4 Nm torque without out-of-step, and that the positioning accuracy using PI-D controller with a square root element is about 10 nm.
社団法人日本機械学会の論文
1998-09-25