光学式非接触プローブの研究

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An optical non-contacting probe for detecting displacement, position and inclination of a work surface is developed. The probe uses two or four light beams, intersecting at an angle at a point near the work surface and making spots on it. Images of the spots are formed on an optoelectronic device by a condensing lens. The position of the spots and the distance between them, and those of the images are depending on the distance between the intersection of the beams and the work surface, and the inclination of it. The position of the images and the distance between them are detected by the optical device and then the output of it is converted into a signal representing the displacement, the position or the inclination of the work surface by an electronic circuit. An experimental probe is arranged utilizing two beams. Two inter-secting angles, 90° and 30°, and two optical devices, a quartered photo dio and a position sensi detive detector, are examined Measurements of three work surfaces, a sandy, a lathed and a ground surface, are carried out. The displacement of three work surfaces is measured successfully. The position and the inclination of the sandy surface are also detected as expected. Some cases of the position and the inclination measurements of the lathed and the ground surface are shown to be difficult because the incident beams on the work surfaces are reflected specularly rather than diffusely and the condensation of the reflected light by the lens becomes inadequate.
公益社団法人精密工学会の論文
1984-07-05

光学式非接触プローブの研究

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