220 高機能光学素子金型用アモルファス合金のコンビナトリアル探索(超精密・マイクロ加工)

概要

論文の詳細を見る
This paper reports combinatorial search of novel amorphous alloy for advanced optical element (such as aspheric glass lens with diffraction grating etc.) forming die. Required properties of the amorphous alloy are as follows ; (a) the amorphous alloy film can be fabricated thickness more than 50μm on blank die. (b) Even if die of the amorphous alloy forms on a glass in air, the alloy do not crystallize and oxidize, and don't adhere to the glass. (c) Ultra-precision machining (surface roughness under 30nm Rmax) by single-point diamond machining (SPDM) is applicable to the alloy. (d) The fracture strength is more than 0.6GPa at least. To search the novel amorphous alloy, we employ combinatorial arc plasma deposition (CAPD). Pt-Hf-Zr-Ni amorphous alloy was picked out from over 25,000 samples using CAPD. The alloy filled the request and it succeeded in fabricating an advanced optical element forming die by SPDM.
社団法人日本機械学会の論文
2006-11-25