Characterization of the Pt-Hf-Zr-Ni Thin Film Amorphous Alloys for Precise Optical Glass Lens Mold
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概要
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We researched the characteristics of the Pt-Hf-Zr-Ni thin film amorphous alloys for precise optical glass lens mold. The five Pt-Hf-Zr-Ni thin film amorphous alloys having various alloy composition were prepared. Desired characteristics for the glass lens mold were researched. Thus, the Pt51Hf20Zr17Ni12 sample was found as the candidate material for the glass lens mold. This sample showed the crystallization temperature of 994 K, the fractured stress of 1.01 GPa and anti-sticking properties to molten glass. However, since the Pt51Hf20Zr17Ni12 sample exhibited insufficient oxidation resistance, it is necessary to inhibit oxidation with protective coating in order to apply this sample to glass lens mold. Moreover, the Pt51Hf20Zr17Ni12 sample fabricated using alloy target could be cut to taperd shape by the single crystal diamond tools without tool wear.
- 社団法人 日本機械学会の論文
著者
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桜井 淳平
東京工業大学精密工学研究所
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SAKURAI Junpei
Precision and Intelligence Laboratory, Tokyo Institute of Technology
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HATA Seiichi
Precision and Intelligence Laboratory, Tokyo Institute of Technology
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YAMAUCHI Ryusuke
Precision and Intelligence Laboratory, Tokyo Institute of Technology
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SHIMOKOHBE Akira
Precision and Intelligence Laboratory, Tokyo Institute of Technology
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