PRE-10 DESIGN AND FABRICATION ON A NOVEL TRAVELING WAVE TYPE CYLINDRICAL ULTRASONIC LINEAR MICROACTUATOR(MM/Micro/Nano Precision Equipments IV,Technical Program of Oral Presentations)
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概要
- 論文の詳細を見る
A piezoelectric ultrasonic microactuator is presented, with a cylindrical stator and slider structure. The length and diameter of the microactuator are about 10 and 1.5 mm, respectively. The stator consists of two piezoelectric ceramic (PZT) tubes connected by a thin film metallic glass (TFMG) pipe, which is fabricated using the rotating magnetron sputtering technique. Traveling wave propagation is generated on the TFMG pipe in finite element method (FEM) simulations. Bi-directional motion of the slider was observed successfully around 600 kHz, and the maximum velocity was about 40 mm/s at 25 V.
- 2009-06-17
著者
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桜井 淳平
東京工業大学精密工学研究所
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SUN Dongming
Precision and Intelligence Laboratory, Tokyo Institute of Technology
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WANG Sheng
Precision and Intelligence Laboratory, Tokyo Institute of Technology
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SAKURAI Junpei
Precision and Intelligence Laboratory, Tokyo Institute of Technology
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HATA Seiichi
Precision and Intelligence Laboratory, Tokyo Institute of Technology
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SHIMOKOHBE Akira
Tokyo Institute of Technology
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HATA Seiichi
Tokyo Institute of Technology, Precision and Intelligence Laboratory
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Hata Seiichi
Precision And Intelligence Laboratory Tokyo Institute Of Technology
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Sun Dongming
Precision And Intelligence Laboratory Tokyo Institute Of Technology
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Wang Sheng
Precision And Intelligence Laboratory Tokyo Institute Of Technology
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