Characteristics of Cu–Zr Thin Film Metallic Glasses Fabricated Using a Carousel-Type Sputtering System
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概要
- 論文の詳細を見る
We evaluated the characteristics of Cu–Zr thin film metallic glasses (TFMGs) fabricated using a carousel-type sputtering system. In this system, it is easy to synthesize samples and control their alloy composition by controlling the radio-frequency power for each target independently. In the present study, we demonstrated the fabrication of Cu–Zr TFMGs and evaluated their thermal properties. Cu–Zr samples of various compositions showed a glass transition; however, the thermal properties of the Cu–Zr TFMGs depended on the sputter rate of each element. At the least, the sputter rate of each element during a single rotation of the substrate was set to less than the respective atomic diameter in order to obtain Cu–Zr TFMGs with a stable glass transition.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2009-02-25
著者
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SAKURAI Junpei
Precision and Intelligence Laboratory, Tokyo Institute of Technology
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Shimokohbe Akira
Precision & Intelligence Laboratory Tokyo Institute Of Technology
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Hata Seiichi
Precision And Intelligence Laboratory Tokyo Institute Of Technology
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Shimokohbe Akira
Precision and Intelligence Laboratory, Tokyo Institute of Technology, 4259 Nagatsuta, Midori-ku, Yokohama 226-8503, Japan
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Sakurai Junpei
Precision and Intelligence Laboratory, Tokyo Institute of Technology, 4259 Nagatsuta, Midori-ku, Yokohama 226-8503, Japan
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Hata Seiichi
Precision and Intelligence Laboratory, Tokyo Institute of Technology, 4259 Nagatsuta, Midori-ku, Yokohama 226-8503, Japan
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