An Active Aerostatic Spindle with an Axial-Positioning Actuator for Machining Ultra-Micro Scale Structures(Precision positioning and control technology)

概要

論文の詳細を見る
An active aerostatic spindle with an axial-positioning actuator has been developed to aid the fabrication of ultra-precision and compact machine tool elements. The spindle incorporates a pair of radial air bearings that not only work as high-precision radial bearings to support the spindle shaft, but which also act as a linear guide-way in the axial direction. The rotating shaft has a peak-to-peak vibration amplitude of less than 20nm in the axial positioning direction, and an NRRO (None Repeatable Run-Out) of 8nm in the radial direction. In order to evaluate the limit of resolution of the aerostatic spindle for axial machining, ultra-micro steps were machined on oxygen-free copper plates using a single crystal diamond tool. The minimum step-height and surface roughness of the machined structure were 25nm and about 10nmRa, respectively.
2005-10-18