MCH-06 POSITIONING CONTROL OF A CANTILEVER TYPE MICROACTUATOR USING HIGH-PERFORMANCE NdFeB/Ta THIN FILM MAGNET AND BUILT-IN DISPLACEMENT SENSOR(Micro/Nanomechatronics III,Technical Program of Oral Presentations)
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概要
- 論文の詳細を見る
A SiN_x-based cantilever type microactuator with length of the order of 1mm was fabricated and evaluated. Multilayered thin films of NdFeB and Ta, with total thicknesses of 3μm, were deposited on the front-end plate of a 3μm-thick SiN_x cantilever by magnetron sputtering. Pt strain gauges were fabricated on the cantilever, acting as a build-in displacement sensor. Positioning control was realized by using a PID controller, with the output from the strain gauge sensor as the feedback signal. The positioning resolution and bandwidth of the actuator were 2μm and 240 Hz, respectively.
- 一般社団法人日本機械学会の論文
- 2009-06-17
著者
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Goto Shunji
Department Of Mechano-micro Engineering Interdisciplinary Graduate School Of Science And Engineering
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SHINSHI Tadahiko
Precision and Intelligence Laboratory, Tokyo Institute of Technology
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Tanabe Ryo
Department Of Mechano-micro Engineering Interdisciplinary Graduate School Of Science And Engineering
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Uehara Minoru
Hitachi Metals Ltd.
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YAO Sen
Department of Mechano-Micro Engineering, Interdisciplinary Graduate School of Science and Engineerin
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YAMAMOTO Hitoshi
Hitachi Metals, Ltd.
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Shinshi Tadahiko
Precision & Intelligence Laboratory Tokyo Institute Of Technology
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Yao Sen
Department Of Mechano-micro Engineering Interdisciplinary Graduate School Of Science And Engineering
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Yamamoto Hitoshi
Hitachi Metals Ltd.
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