Control of an XY Nano-Positioning Table for a Compact Nano-Machine Tool(<Special Issue>Advanced Manufacturing Technology [I])
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概要
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This paper describes the control of an XY nano-positioning table for a compact nano-machine tool. The aim of its controller design is to provide (1) high motion accuracy, (2) high robustness to disturbance forces and (3) high bandwidth. The controller has a PID element as a tandem compensator and a feedforward compensator. A bandpass filter is added so that the table system can show the mentioned specifications (1) and (2). The reference following characteristic and the robustness to disturbance forces are examined and evaluated theoretically and experimentally. The results prove that the table control system is suitable for a compact ultraprecision machine tool, attaining high positioning accuracy and frequency response up to 500Hz in a circular motion of a 100nm radius.
- 一般社団法人日本機械学会の論文
- 2006-03-15
著者
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Maeda Guilherme
Interdisciplinary Graduate School Of Science And Engineering Tokyo Institute Of Technology
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SHINSHI Tadahiko
Precision and Intelligence Laboratory, Tokyo Institute of Technology
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HASHIZUME Hitoshi
Precision and Intelligence Laboratory, Tokyo Institute of Technology
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Sato Kaiji
Interdisciplinary Graduate School Of Science And Engineering Tokyo Institute Of Technology
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Shinshi Tadahiko
Precision And Intelligence Laboratory Tokyo Institute Of Technology
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Shinshi Tadahiko
Precision & Intelligence Laboratory Tokyo Institute Of Technology
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Hashizume Hitoshi
Precision And Intelligence Laboratory Tokyo Institute Of Technology
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Maeda Guilherme
Interdisciplinary Graduate School Of Sci. And Engineering Tokyo Inst. Of Technol. 4259 Nagatsuta Mid
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Sato Kaiji
Interdisciplinary Graduate School Of Sci. And Engineering Tokyo Inst. Of Technol. 4259 Nagatsuta Mid
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