A Study on Nanometer Positioning Table System Equipped with Electrorheological Fluid Units
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概要
- 論文の詳細を見る
With the increasing demands for higher accuracy and higher productivity in the manufacturing environment, ultraprecision table positioning technology of nanometer order is urgently required. In order to meet these requirements, it is necessary and indispensable to develop the ultraprecision table systems of noncontact type, which is constructed from an aerostatic guideway and a linear motor. However, such a table system of noncontact type has low performances in the positioning stability and the disturbance response, because of friction free and low damping capacity in the guideway. Inthis study, therefore, a linear motor-driven ultraprecision aerostatic table system equipped with electrorheological fluid (ERF) units has been developed. Furthermore, it has been verified that the developed ERF units are effective and applicable to simultaneously achieve quick-response and nanometer positioning accuracy.
- 一般社団法人日本機械学会の論文
- 2000-03-15
著者
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Shinno Hidenori
Precision And Intelligence Laboratory Tokyo Institute Of Technology
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HASHIZUME Hitoshi
Precision and Intelligence Laboratory, Tokyo Institute of Technology
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Hashizume Hitoshi
Precision And Intelligence Laboratory Tokyo Institute Of Technology
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