D6 A Newly Developed X-Y Planar Nano-Motion Table System with Large Travel Ranges(Precision positioning and control technology)
スポンサーリンク
概要
- 論文の詳細を見る
The nano-motion control system of multiple degrees of freedom positioning in large travel ranges has been required in the field of precision engineering. In order to realize such a system, it is necessary and indispensable to develop a planar motion table system based on a new design concept. This paper presents a newly developed X-Y planar nano-motion table system with large travel ranges. This system is composed of a fine motion table and a coarse motion mechanism. Performance evaluation results confirm that the developed table system has a remarkable performance which includes nanometer positioning capability over large travel ranges.
- 2009-12-01
著者
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KURISAKI Yugo
Precision and Intelligence Laboratory, Tokyo Institute of Technology
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SAWANO Hiroshi
Precision and Intelligence Laboratory, Tokyo Institute of Technology
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SHINNO Hidenori
Precision and Intelligence Laboratory, Tokyo Institute of Technology
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Shinno Hidenori
Precision And Intelligence Laboratory Tokyo Institute Of Technology
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Yoshioka Hayato
Precision And Intelligence Laboratory Tokyo Institute Of Technology
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Kurisaki Yugo
Precision And Intelligence Laboratory Tokyo Institute Of Technology
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Sawano Hiroshi
Precision And Intelligence Laboratory Tokyo Institute Of Technology
関連論文
- A Newly Developed X-Y Planar Nano-Motion Table System with Large Travel Ranges
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