High-frequency fatigue test of metallic thin films using PVDF microactuator
スポンサーリンク
概要
- 論文の詳細を見る
Novel high-frequency bending fatigue test method for sputtered metallic thin films using PVDF microactuator is proposed. Thin film titanium specimen as an example and a PVDF piezoelectric microactuator are fabricated. The specimen is stamped on this actuator and the actuator is vibrated at its resonance frequency until the specimen fails by fatigue. The stress in the specimen is calculated from vibration amplitude. By using the proposed method, the stress-fatigue life cycle (S-N) curve of the thin film titanium is obtained over 50 times faster than conventional method.
著者
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SAKURAI Junpei
Precision and Intelligence Laboratory, Tokyo Institute of Technology
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Hata Seiichi
Precision And Intelligence Laboratory Tokyo Institute Of Technology
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Nakamitsu Yutaka
Precision and Intelligence Laboratory, Tokyo Institute of Technology
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Sato Kohei
Precision and Intelligence Laboratory, Tokyo Institute of Technology
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Suzaki Ryo
Precision and Intelligence Laboratory, Tokyo Institute of Technology
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Tamjidi Nastaran
Precision and Intelligence Laboratory, Tokyo Institute of Technology
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