MNM-3B-4 円筒形超音波リニアマイクロアクチュエータ(セッション 3B 情報・精密機器におけるマイクロ・ナノテクノロジー2)

概要

論文の詳細を見る
A piezoelectric ultrasonic microactuator with a cylindrical stator and slider structure is presented. The length and diameter of the microactuator are about 10 and 1.5 mm, respectively. The stator consists of two piezoelectric ceramic (PZT) tubes connected by a thin film metallic glass (TFMG) pipe, which is fabricated using the rotating magnetron sputtering technique. Traveling wave propagation is generated on the TFMG pipe in finite element method (FEM) simulations. In the experiment, bi-directional motion of the slider was observed at the frequency of around 600 kHz and applied voltage of 70 V_<p-p>. At this condition, the maximum output force and maximum velocity were about 6mN and 340mm/s, respectively.
2010-10-12