An Ultrafine Motion Table Using Piezoelectric Actuator for Ultraprecision Grinding

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概要

• 論文の詳細を見る
• 1996-12-01

著者

• SHIMOKOHBE Akira

  Tokyo Institute of Technology

• Hata Seiichi

  Tokyo Institute Of Technology

• OTSUKA Jiro

  Shizuoka Institute of Science and Technologies

• KOSHIMIZU Shigeomi

  Shizuoka Institute Science and Technology

• Koshimizu Shigeomi

  Shizuoka Institute Of Science And Technology Mechanical Engineering

関連論文

• A Traveling Wave Type of Piezoelectric Ultrasonic Bidirectional Linear Microactuator
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• Thermal, Mechanical and Electrical Properties of Pd-Based Thin-Film Metallic Glass : Surfaces, Interfaces, and Films
• Physical properties Pd-based thin film metallic glass
• Built-in Capacitive Displacement Sensor with Long Full-Scale Range for Electrostatic Microactuators
• An Ultrafine Motion Table Using Piezoelectric Actuator for Ultraprecision Grinding
• Practical Resolution and Thermal Properties on Ultra-Precision Displacement Sensors
• Study on an Ultraprecision Grinding Wheel Spindle, Both-end Supported
• Friction of Sliding Leadscrews under Hydrodynamic Lubrication : 2nd Report, Verification of Drunkenness-Model Theory and Consideration of Appropriate Driving Condition
• C-20 CUTTING OF TITANIUM ALLOY USING MINIMUM QUANTITY LUBRICATION (MQL)(Session: Cutting)

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