Practical Resolution and Thermal Properties on Ultra-Precision Displacement Sensors
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概要
- 論文の詳細を見る
- 2002-10-01
著者
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Feng Bo
Shizuoka Institute Of Science And Technologies
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OTSUKA Jiro
Shizuoka Institute of Science and Technologies
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YAMAGUCHI Yashiyuki
Shizuoka Institute of Science and Technologies
関連論文
- An Ultrafine Motion Table Using Piezoelectric Actuator for Ultraprecision Grinding
- Practical Resolution and Thermal Properties on Ultra-Precision Displacement Sensors
- Study on an Ultraprecision Grinding Wheel Spindle, Both-end Supported
- Friction of Sliding Leadscrews under Hydrodynamic Lubrication : 2nd Report, Verification of Drunkenness-Model Theory and Consideration of Appropriate Driving Condition