439 エレクトロマイグレーションを用いたナノストラクチャー創製の数値シミュレーション手法の開発(T08-1 金属ナノ材料の創製と展開(1) 金属ナノ材料の創製,大会テーマセッション,21世紀地球環境革命の機械工学:人・マイクロナノ・エネルギー・環境)

概要

論文の詳細を見る
It is known that the high current density and high temperature due to the scaling down of electronic devices cause electromigration, which is one of the most frequent failures in the metal line. Electromigration is the phenomenon that the metallic atoms are transported by electron wind due to high current density. A technique of generating metallic nanostructure by utilizing electromigration has recently been proposed. The present study proposed a numerical simulation method of the nanostructure-generation technique based on the prediction method of electromigration failure, and the results of the simulation were verified through experiment.
社団法人日本機械学会の論文
2008-08-02