T0301-1-5 異なる創製条件下のエレクトロマイグレーションによる金属ナノストラクチャー創製の数値シミュレーション([T0301-1]金属ナノ材料の創製と展開(1))

概要

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A technique of producing metallic nanostructure by utilizing electromigration has been proposed. Electromigration is the phenomenon that the metal atoms are transported by electron wind due to high density current. A numerical simulation method of nanostructure formation utilizing electromigration was recently developed based on the governing parameter for electromigration damage, AFD_<gen>. However, the simulation did not cover the period of specimen's damage. In the present study, the numerical simulation method of the nanostructure-production technique is developed considering electromigration failure of specimen. The results of the simulations are verified comparing experimental results. A good agreement between them is found in the produced nanostructure volume. The simulation is expected to be useful for identifying conditions for nanostructure production.
一般社団法人日本機械学会の論文
2010-09-04