空圧式除振装置に使用するノズルフラッパ形サーボバルブの振動抑制の定量化と除振台上の振動低減効果(機械力学,計測,自動制御)

概要

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In the field of precision positioning, an air type anti-vibration apparatus has been widely used. To realize the low vibration circumstance, some fundamental developments that decrease the natural frequency of isolated table are still executed. In addition to such development, many time-consuming jobs are necessary to eliminate the high frequency dynamics of isolated table. However, it is not recognized that the nozzle flapper type servo valves used in the anti-vibration apparatus are the mechanical vibration sources. Then, we previously tried to suppress the vibration level of its valve using the viscoelastic material, and the vibration level of isolated table also can be reduced in case of the servo valve with the mass damper using the viscoelastic material. In this paper, it is firstly shown that the best vibration reduced means is to insert the viscoelastic rectangle piece into a torsion spring. Next, the physical parameters of servo valve are identified under the condition without and with the above best means. Finally, an assembly method, which is derived after repeated trial and error, for the servo valve with the viscous torsion spring is shown and the vibration reduction effect on the isolated table is shown.
社団法人日本機械学会の論文
2009-07-25