空圧式除振装置に対する正帰還を用いた圧力フィードバックの高帯域化(機械力学,計測,自動制御)

概要

論文の詳細を見る
An air-spring type active anti-vibration apparatus has been widely used in the field of precision positioning. In order to avoid the deformation of main body supported by air springs and to compensate the incline of this body due to the mounted positioning unit, the pressure feedback was especially implemented as a minor loop. However, the frequency band of this loop was restricted by a pair of anti-resonance and resonance characteristic appearing in the pressure response. Then, this paper proposes to add the positive feedback for canceling the pair and shows that the frequency response of pressure loop can be flattened. Moreover, the overall control system including the proposed positive feedback is shown and the design conditions for this system are clarified. It is clear that the transmissibility from the floor vibration to the isolated table vibration is not affected by the proposed positive feedback.
一般社団法人日本機械学会の論文
2006-07-25