相対加速度の積分信号を用いた空圧式除振装置の制御

概要

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Precision instrument has maximum permissible vibration in the field of precision positioning. An anti-vibration apparatus has been widely used to restrain floor vibration in this field. In order to avoid the deformation of main body supported by air springs and to eliminate air spring stiffness, the control system of anti-vibration apparatus having the positive feedback using differential signal of relative position was previously proposed. However disturbance suppression characteristic of conventional system is not well because the differential operation increases high frequency sensor noises. Therefore, the positive feedback using integrated signal of relative acceleration is proposed. This system has the elimination function of air spring stiffness and good disturbance suppression characteristic. Then, this paper firstly explains the elimination function of air spring stiffness in this system. Secondly, the disturbance suppression characteristics of this system are compared with that of conventional system. Finally, the problem of implementation due to the high-gain feedback is explained.
公益社団法人精密工学会の論文
2008-09-05