アクチュエータの多点配置によるアクティブ除振装置の広帯域化(機械力学,計測,自動制御)

概要

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In the field of ultra accurate positioning system, such as semiconductor lithograph machine, an active isolation system is generally used. Especially, it is an indispensable unit in the system which is required a highly accurate isolation performance from outside in the semi-conductor exposure machine. In a present lithograph manufacturing machine, the scanning type is a main current, furthermore the main structure supported projection lens is separated from stage which can be freely moved in the stage stroke, and the stage is supported by independent isolation system on the base. At this time, the controller cannot achieve enough performance which is required of the system, because mechanical resonance limit control bandwidth. In this paper, the control band-width can be given by making compensates using many actuators mounted under approximate layout for mechanical resonance of structure. Therefore it is able to get high control bandwidth, and achieve enough performance and robustness for disturbance is improved.
2010-03-25