元圧変動フィードフォワード補償の切替えによるハンチングの一抑制法

概要

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In the field of precision measurement and positioning, an active anti-vibration apparatus is the necessary equipment to realize the low vibration environment. However, there was a problem that the position fluctuation of isolated table was generated due to the pressure fluctuation of supplied air. Then, in order to suppress the position fluctuation, a feedforward method using the detected signal of supplied air pressure was previously proposed. In the steady state, the fluctuation of isolated table was sufficiently suppressed using the feedforward compensation. However, a new problem, such that the fluctuation of isolated table is generated due to the switching of feedforward compensator, occurs. To overcome this problem, in this paper, the feedforward compensator is firstly reconstructed for easily parameter tuning. Next, the soft switching is introduced to moderate the fluctuation of isolated table due to the ON/OFF feedforward switching. Furthermore, the feedforward based on the difference detection of supplied air signal is proposed to realize perfect suppression. Finally, using the real air type anti-vibration apparatus, remarkable experimental results are shown.
社団法人精密工学会の論文
2008-09-05