空圧式除振装置に対する元圧・元流量変動フィードフォワード制御

概要

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In the field of precision measurement and positioning, air-type anti-vibration apparatuses are commonly used. There is the pressure fluctuation of supplied air and then the position fluctuation of isolated table due to the supplied air pressure is generated. This pressure fluctuation can be usually suppressed using the multi-connection of air regulator. However, the drawback is that this connection method produces the pressure loss. Then, in this paper, a method to reduce the position fluctuation is presented. Firstly, the mechanical structure and the control scheme of air-type anti-vibration apparatus are briefly clarified. Secondary, the fluctuations of supplied air-pressure, air-spring pressure, and isolated table displacement are shown respectively and the feedforward control scheme to compensate the position fluctuation is derived. In detail, several feedforward compensators are derived based on the control system including the disturbance model. Finally, remarkable experimental results are shown.
社団法人精密工学会の論文
2007-11-05