電子光学的剛性設計による透過型電子顕微鏡の耐振性の改善

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This paper addresses a countermeasure of the vibration for electron microscopy. The mechanical design method against the environmental vibration disturbance for Transmission Electron Microscope (TEM) that magnifies the specimen image 1 million times must be different from the ordinary machine design. We described the specific vibration models of TEM and STEM (Scanning Transmission Electron Microscope) from the point of view on the electron optics, and showed the stiffness of the structure around the objective lens (in other words, the loop stiffness between the specimen and the pole piece of the objective lens) has the largest influence on electron-optical-stiffness. We increased the stiffness around the objective lens of TEM, and showed significant improves on the electron-optical-stiffness on both TEM and STEM images. This electron-optical-stiffness design method will be expanded with the software combination of the mechanical structure and electromagnetic analysis to calculate the amount of the image vibration caused by the environmental vibration disturbance and will be used for the optimization of TEM structure.