Trial Manufacture of Gate Valve for Vacuum and Its Evaluation

概要

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This paper shows positioning of vacuum interrupter's motor which is used in a vacuum chamber. First, we produce a gate valve for vacuum and evaluate its function. The trial manufacture is generally repeated. However, decrease of trial manufacture is carried out. In the positioning of the valve, PI-D control is utilized and an output of MR sensor is fed back. In measurement using MR sensor, positioning within one second is realized, while accuracy of positioning is low. Firstly, by using reinforcement of bearing stiffness with permanent magnet, it is shown that positioning fluctuation is controlled. Next, by compensating both command signal and a MR sensor output, repeatability of positioning is improved. Moreover, three-dimensional dynamic analysis of motor in vacuum interrupter is executed using magnetic analysis software “MagNet7”. Comparing experimental and simulated positioning results, two results are almost corresponded. Finally, sequential operation of the valve can be executed without mechanical contact under surroundings of both atmosphere and vacuum.