絶対速度・変位センサの広帯域化とその除振装置への適用

概要

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The acceleration sensors as vibration sensors are widely used in the field of vibration control. In order to derive the displacement signal from the acceleration sensor, the second order integration is required. Then, the velocity sensor is convenient for vibration control, because the displacement signal can be easily derived. Furthermore, an absolute displacement sensor is more convenient since the triple signals i.e. acceleration, velocity, and displacement signals can be simultaneously utilized. In this paper, a model of the spurious vibration due to the gravity compensated mechanical spring is firstly derived. Based on this modeling, high frequency characteristic is modified. Next the electrical damping loop is added to suppress resonant peak in the low frequency region. Finally, a frequency shaped displacement sensor is applied to the air-spring type anti-vibration apparatus with voice coil motor. It is shown that the mechanical impedance can be manipulated.
公益社団法人精密工学会の論文