磁気軸受を用いたターボ分子ポンプの制振装置への応用

概要

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The turbo molecular pump using the magnetic bearing has been widely used due to its excellent characteristics such as the contamination-free and the maintenance-free. The pumps are generally mounted on the precision apparatus as vacuum equipment. Then it is necessary to preserve the small vibration level. However, although the vibration level of TMP is negligible small, the structure having the TMPs vibrates itself and then the quality of producing materials is degraded. To overcome the vibration problem, this paper proposes that the TMP can be applied as a vibration suppression unit. Firstly, the control structure of TMP on the market is shown and the vibration suppression scheme is clarified. Secondly, it is shown that the bending vibration can be suppressed by driving the TMP attached to the vibration beam. Finally, the motional mode control scheme is shown, and both 1st and 2nd bending vibration modes are simultaneously suppressed.
公益社団法人精密工学会の論文
2005-09-05