三軸微動ステージに対する変形運動モード別非干渉化制御系の適用

概要

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In order to realize higher positioning, we previously proposed motional mode decoupling control for a fine-motion stage. In this control scheme, both the motional mode selector and distributor are prepared. The former is the matrix to calculate the motional-mode signals from the sensor's outputs, and the later is the matrix to calculate the driving signals. However, the operation error of the motional mode selector introduces the positioning error. Then, in this paper, a modified motional mode decoupling control scheme is proposed to reject the above error. Firstly, this control scheme in which the motional mode selector is assigned on the forward-path in the feedback system is clarified. Next, the positioning performance of this scheme is illustrated by experimental results. Finally, the robust performance aganist the operation error is shown. Its feature is useful to reconstruct the motional mode decoupling control system instead of the conventional control system with individual feedback loop.
2001-06-25