コロケーション補正と運動モード別非干渉化制御を併用する3軸微動ステージの制御特性

概要

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The piezo element as a representative displacement type actuator elicits a high-speed response. Recently, there has been much research carried out using this feature. In order to progress the control performance, we previously proposed the motional-mode-based decoupling control scheme for a three-degrees-of-freedom fine-motion stage with piezo elements. In the meantime, we proposed the collocation compensation method to realize the desirable positioning. As is well known, the controlled object on the condition that the actuators and sensors are collocated shows good control performance. Then, it is expected that the motional-mode-based decoupling control together with collocation compensation can realize the good performance all the more. However, this paper shows that the collocation compensation for the above control scheme has an effect on the only difference of the loop-gain for each motional mode. This result is useful for the mechanical design.
公益社団法人精密工学会の論文
1998-09-05