圧電素子を備えた除振装置のフィルタ包含LQ制御

概要

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Anti-vibration units have been developed to realize micro-vibration circumstance. Recently, the anti-vibration units using the piezo-elements have been widely developed. For these units having the velocity sensors to detect the vibration of structure, the full state feedback can be applied to improve the transmissibility from the floor vibration. However, there is a weak point so that the large displacement of piezo-element is excited for an impulsive floor vibration. Considering the time constant of piezo-driver, it is considered that its displacement is substantially relieved. In fact, a pointed piezo-displacement becomes zero owing to the time constant of driver. On the contrary, the transient response easily becomes a vibrational wave form, namely unstable. Then, in this paper, the Filtered LQ control is proposed to ensure both the stability of control loop and the zero response for impulsive input. First, the state equation including the dynamics of piezo-driver is shown. Next, the role of feedback parameters is clarified in comparison with the ordinary state feedback. Finally, this paper shows that high quality transmissibility is realized coping with both the stability and the avoidance of sudden response.
公益社団法人精密工学会の論文
2004-06-05