ボイスコイルモータを使った除振台の傾斜補正

概要

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In the field of an accurate positioning system, an active isolation system is generally used. Especially, it is an indispensable unit in the system which is required a highly accurate isolation performance from outside in the semiconductor lithograph machine. In a present lithograph manufacturing machine, the scanning type is a main current, and the wafer stage can be freely moved in the direction of XY of two degrees-of-freedom, and reticle stage can be moved in only Y direction. At this time, the inclination is caused as proportional to movable stroke of the stage. In this paper, the inclination of the main body structure is corrected by driving the voice coil motor which is prepared for with the air spring based on the location information of the stage to achieve the throughput improvement as the production unit. However, driving resolution and accuracy of the air spring are lower than that of VCM. In addition, the air response to the feedforward input for the inclination compensation is greatly late compared with VCM. Therefore, it is thought that the inclination compensation by using VCM rather than air is excellent from the standpoint of the improvement of the total machine accuracy such as decreases of heat generations by stage driving motor and fluctuation of the interferometer.
社団法人精密工学会の論文