ピエゾ素子とVCMを備えた除振装置の除振条件に関する一考察

概要

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Anti-vibration units have been developed to realize micro-vibration circumstance. Recently, the anti-vibration units with the piezo-elements have been widely developed. In order to improve the transmissibility from the floor vibration to the isolated table vibration, 2 degrees-of-freedom mechanical isolated apparatus has been applied in the production field. In its apparatus, the piezo-element and the acceleration sensor were normally installed. However, in this paper, the voice coil motor is newly implemented and the velocity sensors instead of the acceleration sensors are used. Firstly, the mechanical model is shown and the complete isolated condition is derived under the condition of the full-state feedback. Secondly, it is shown that its condition relates the result of zeroing control theory and also coincides with the known feedforward control from the floor vibration. Finally, dynamics of actuators and that of velocity sensors are reasonably set to examine both the performance concerned with the transmissibility and the engineering possibility. As a result, the driving displacement of piezo element and the driving force of VCM are confined within the limits.
公益社団法人精密工学会の論文
2005-05-05